JobsSr. Process Engineer, Lithography, Terafab
Job description
The role involves developing and qualifying lithography processes for a semiconductor factory, focusing on advanced chip families. Candidates should have expertise in optical lithography and be prepared to work across various process domains, contributing to one of the most ambitious semiconductor fabrication programs.
Requirements
- Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience
- 5+ years of hands-on lithography process engineering experience in a semiconductor fab, especially <7nm in a logic, memory, or foundry environment
- Deep experience with scanner qualification (ASML or equivalent), resist process development, and process of record (POR) establishment at advanced nodes
- Proficiency with lithography metrology tools: CD-SEM, OCD, overlay metrology, defect inspection, and resist profile characterization
- Strong DOE skills and statistical analysis capability (JMP, Python, or R)
- Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams
Responsibilities
- Develop and qualify EUV and ArFi resist processes, exposure parameters, and coat/develop optimization for critical layers
- Qualify scanners (EUV and DUV) from installation through production readiness, including dose-focus matrices, CDU, and overlay
- Own in-house mask shop process development (resist, etch, inspection, repair) and co-optimize reticle-scanner strategies using tight feedback loops
- Establish overlay and registration control strategies, scanner-to-scanner matching, and APC loop integration
- Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes
- Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
- Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
- Drive next-generation lithography materials and process development
Benefits
- Employees at Tesla are often offered day-one coverage with multiple medical options (some at $0 paycheck cost), dental/vision, company HSA contributions, a 401(k) match, and equity programs. Most roles also include paid time off and holidays, family-building support, employee assistance, commuter and childcare benefits, and access to discounts and wellness programs.
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