JobsSr. Process Engineer, Chemical Mechanical Planarization, Terafab
Sr. Process Engineer, Chemical Mechanical Planarization, Terafab
TeslaSr. Process Engineer, Chemical Mechanical Planarization, Terafab
TeslaLocation
Austin, TX
Type
Full-time
Posted
4/16/2026
Compensation
Not listed
Undergraduate with 5+ Years of Experience
Approval 99.3%·Filings 1,102·New hires 320·
💎 Strong Sponsor
·FY 2025Job description
The role involves developing and qualifying chemical mechanical planarization (CMP) processes for various semiconductor chip families at Terafab. Candidates should have extensive CMP experience and be prepared to work across multiple process domains in a hands-on environment.
Requirements
- Degree in Chemical Engineering, Materials Science, Electrical Engineering, Mechanical Engineering, or related technical field, or equivalent experience
- 5+ years of hands-on CMP process engineering experience in a semiconductor fab, especially <7nm in a logic, memory, or foundry environment
- Deep experience with CMP tool qualification, slurry and pad optimization, and process of record establishment at advanced nodes
- Proficiency with CMP metrology tools: film thickness measurement, defect inspection, surface roughness measurement, and dishing/erosion characterization
- Strong DOE skills and statistical analysis capability (JMP, Python, or R)
- Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams
Responsibilities
- Develop and qualify CMP processes for STI, ILD, metal layers, and barrier films across all interconnect levels for two concurrent product flows
- Optimize removal rates, within-wafer uniformity, planarization efficiency, and surface finish through systematic DOE and first-principles analysis
- Own post-CMP clean process qualification including brush scrub and chemical clean steps
- Qualify CMP tools from installation through production readiness, including pad conditioning, slurry delivery, and endpoint detection
- Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms
- Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
- Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
- Drive next-generation CMP slurry formulations and process development
Benefits
- Employees at Tesla are often offered day-one coverage with multiple medical options (some at $0 paycheck cost), dental/vision, company HSA contributions, a 401(k) match, and equity programs. Most roles also include paid time off and holidays, family-building support, employee assistance, commuter and childcare benefits, and access to discounts and wellness programs.
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