JobsSr. Process Engineer, Dry Etch, Terafab
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Sr. Process Engineer, Dry Etch, Terafab

Tesla

Location

Austin, TX

Type

Full-time

Posted

4/16/2026

Compensation

Not listed

Undergraduate with 5+ Years of Experience
Approval 99.3%·Filings 1,102·New hires 320·
💎 Strong Sponsor
·FY 2025

Job description

The role involves developing and qualifying plasma etch processes for advanced semiconductor manufacturing at Terafab. Candidates will work on etch processes for various chip families, optimizing selectivity and profile control while collaborating across multiple engineering domains.

Requirements

  • Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience
  • 5+ years of hands-on dry etch process engineering experience in a semiconductor fab, especially <7nm in a logic, memory, or foundry environment
  • Deep experience with etch tool qualification (Lam, Applied Materials, or Tokyo Electron), plasma etch process development, and process of record (POR) establishment at advanced nodes
  • Proficiency with etch metrology tools: CD-SEM, TEM, XPS, defect inspection, and etch profile characterization
  • Strong DOE skills and statistical analysis capability (JMP, Python, or R)
  • Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams

Responsibilities

  • Develop and qualify plasma etch processes for critical layers—gate, spacer, contact, and metal interconnect—at 2nm-class dimensions
  • Develop atomic layer etch (ALE) processes for steps requiring angstrom-level profile and selectivity control
  • Optimize etch profiles, CD control, uniformity, and selectivity using a first-principles, physics-based approach to plasma chemistry and etch mechanism understanding
  • Qualify etch tools from installation through production readiness, including chamber seasoning, plasma characterization, and process window qualification
  • Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes
  • Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
  • Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
  • Drive next-generation plasma etch chemistry and process development

Benefits

  • Employees at Tesla are often offered day-one coverage with multiple medical options (some at $0 paycheck cost), dental/vision, company HSA contributions, a 401(k) match, and equity programs. Most roles also include paid time off and holidays, family-building support, employee assistance, commuter and childcare benefits, and access to discounts and wellness programs.

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